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GEM300 standards for automated production
A 300 mm carrier loaded with wafers is too heavy for repeated manual lifting. Instead, carriers must be delivered directly and automatically to the equipment. This requires standardization in the shape of GEM300 communication standards.
Adhering to GEM300 standards is essential for fully automated 300 mm production lines, where individual wafers can be worth millions of Euros, and are at even greater risk of breakages and misprocessing than 200 mm lines.
PANalytical's 2830 ZT was the market's first XRF Wafer Analyzer to meet GEM300 standards, bringing fast, accurate –and automated –thin-film analysis of all films in leading-edge semiconductors.
GEM300 is the catch-all name for the SEMI standards that address 300 mm automation. These cover the software and hardware requirements for automated process control of processing and metrology tools, including the interfaces with AGVs, PGVs and RGVs (automatic, personal and rail guided vehicles) and OHTs (overhead hoisted transports).
GEM300 provides a consistent interface towards the factory host, while the SEMI E95 compliant user interface makes the GEM300 functionality available to the user. PANalytical's GEM300 implementation and operational details are continuously being checked against an industry standard test package.
These capabilities join the standard SEMI SECS/GEM communication standards E4, E5, E30 and E37.1.
