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X'Pert Epitaxy and Smoothfit provides functionality for plotting and analyzing rocking curves, 2-axes scans, reciprocal space maps and wafer maps. The software offers a wealth of key information on thin heteroepitaxial layers, particularly single-crystal and highly textured thin-layer samples, such as mismatch and relaxation, composition and layer thickness.
X'Pert Epitaxy and Smoothfit is a part of the X'Pert Software range and uses the XRDML data format. The software is available in three packages:
- X'Pert Epitaxy Graphics – powerful area graphics
X’Pert Epitaxy Graphics provides powerful area graphics, with display and analysis of rocking curves and 2-axes scans (particularly reciprocal space maps) for cubic and hexagonal semiconductors.
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X'Pert Epitaxy – adds rocking curve simulation
X'Pert Epitaxy adds rocking curve simulation, with an interactive pane allowing rapid comparison of simulated and measured scans.
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X'Pert Epitaxy and Smoothfit – automatic rocking curve fitting
X'Pert Epitaxy interprets rocking curves and determines detailed layer structures by automatically fitting a simulated rocking curve to a measurement. The software integrates fitting functions previously only available in separate packages.
Materials database
An extensive materials database is included. It contains materials data for use in rocking curve analysis, wafer mapping, simulation and fitting.
Current version: 4.2
