The 2830 ZT wavelength dispersive X-ray fluorescence (WDXRF) Wafer Analyzer offers the ultimate capability for measuring film thickness and composition. Designed specifically for the semiconductor and data storage industry, PANalytical’s 2830 ZT Wafer enables the determination of layer composition, thickness, dopant levels and surface uniformity for a wide range of wafers up to 300 mm.

Semyos

The Semyos energy-dispersive XRF wafer analyzer is designed specifically for semiconductor and data storage metrology.

Its versatility enables the determination of the composition and thickness of a wide range of process films.

With a measurement microspot less than 23 µm across it can measure within the test pads of production wafers.

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