Micro Focus X-ray Source

The high brilliance micro focus X-ray source is a complete, turnkey X-ray beam module. It delivers double the usable X-ray flux compared with current sealed tube micro focus source technology.

The X-ray source is a stand-alone system and can be integrated into diffraction systems or used in a wide range of other applications.

Complete system

The source comprises a sealed micro focus X-ray tube powered by a 60 kV PANalytical X-ray generator with control software, and can be delivered with a variety of different optics. It represents the latest development in sealed tube technology and graded multi-layer optical design.

Wide ranging applications

The module is ideal for a wide range of applications, including:

• determining protein structures
• semiconductor metrology, improving yield and chip quality in complex electronic devices
• determining nanoparticle size distributions and shape functions in drug delivery mechanism research

Excellent stability

The micro focus X-ray source can operate at 40 W and is offered with Cu and Mo as possible anode materials. The focal dimension of the micro focus tube is 20 µm, and the source has an excellent stability of spot size, spot position and intensity.